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Zeiss O-Inspect 442 Zeiss Calypso

Year of manufacture: 2012
Tactile:
Vast XXT
E0 X/Y (1D) in [μm] at 20 ±2 °C 1.7 + L/250
E0 XY (2D) in [μm] at 20 ±2 °C 1.7 + L/250
E0 (3D) in [μm] at 20 ±2 °C 1.9 + L/250
Scanning probing deviation
MPE according to ISO 10360-4:2000 THP at 2.7 [μm]
Single probe probing deviation form
MPE according to ISO 10360-5:2010
PFTU 1.9 [μm]
Camera system:
Zeiss Discovery 12
EB X/Y (1D) 5) in [μm] at 20 ±2 °C 1.7 + L/250
EB XY (2D) 5) in [μm] at 20 ±2 °C 1.7 + L/250
Probe deviation MPE according to ISO 10360-7:2011
PF2D 5) 1.7 [μm]
Probe deviation of the image processing system
MPE according to ISO 10360-7:2011
PFV2D 5) 1.2 [μm]
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Possible services: delivery, commissioning