Pengimbas 3D profilometer 3D

Keyence VR-5200 mit VR-5000

Keyence
Model: VR-5200
Type: Measuring Head
Light Sources
Viewing Light Source: LED Ring Light (red, blue, green)
Measurement Light Source: White LED
Control Unit: VR-5000
Viewing and Measurement Range
Macro Mode
Magnification (based on a 15-inch monitor) 12×:
Horizontal 24.0 mm
Vertical 18.0 mm
Magnification (based on a 15-inch monitor) 25×:
Horizontal 12.0 mm
Vertical 9.0 mm
Magnification (based on a 15-inch monitor) 38×
Horizontal 8.0 mm
Vertical 6.0 mm
Magnification (based on a 15-inch monitor) 50×
Horizontal 6.0 mm
Vertical 4.5 mm
Micro Mode
Magnification (based on a 15-inch monitor) 40×
Horizontal 7.6 mm
Vertical 5.7 mm
Magnification (based on a 15-inch monitor) 80×
Horizontal 3.8 mm
Vertical 2.9 mm
Magnification (based on a 15-inch monitor) 120×
Horizontal 2.5 mm
Vertical 1.9 mm
Magnification (based on a 15-inch monitor) 160×
Horizontal 1.9 mm
Vertical 1.4 mm
Zoom 1× to 4×
Height Measurement
Measurement Resolution 0.1 µm
Height Measurement Range
Without Z-Compositing
Macro Mode: 10 mm
Micro Mode: 1 mm
With Z-Compositing
Macro Mode: 50 mm
Micro Mode: 30 mm
Repeatability (σ)
Without image stitching in Z
0.4 µm
With image stitching in Z
1.0 µm
Measurement accuracy
Without image stitching in Z
±2.5 µm
With image stitching in Z
±4.0 µm
Width measurement
Repeatability (σ)
Macro mode: 1 µm
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Micro mode: 0.5 µm
Measurement accuracy
Macro mode: ±5 µm
Micro mode: ±2 µm
Image stitching
Fully automatic measurement (automatic XY control + automatic Z focus),
Automatic assignment, automatic area setup
Measurable XY area
206 x 104 mm
Stage
XY travel 184 × 88 mm (motorized)
Z travel 73 mm (motorized)
Load capacity 4.5 kg
Working distance 75 mm
Image pickup element
4-megapixel CMOS, B/W
Transmitter lens
Dual telecentric lens x 2
Receiver lens
Dual telecentric lens
Data processing
Dedicated PC according to KEYENCE specifications (Operating system: Windows 11 Pro)
Power supply
Voltage 100 to 240 V AC, 50/60 Hz
Power consumption Max. 200 VA
Environmental resistance
Ambient temperature 15 to 30 °C
Relative humidity 20 to 80% RH (no condensation)
Weight Approx. 28 kg (weight of the measurement unit only: approx. 11 kg)
Distance extension stage
Viewing software VR-5000 Version 3.3.5.75
Image composition module VR-H3J
Creates a single large image from a series of images captured with the viewing software.
You see color images.
Analysis Expansion Module VR-H3CA
Extends the functionality of the analysis software. Can perform measurement comparison and 3D CAD measurement comparison.
Condition: Used
Scope of delivery: (as shown)
(Subject to change and errors in the technical specifications, information is subject to change!)
We are happy to answer any further questions over the phone.

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