Modul Depan Wafer 300mmBROOKS ASYST
Spartan EFEM Sorter
Modul Depan Wafer 300mm
BROOKS ASYST
Spartan EFEM Sorter
harga tetap ditambah cukai perkhidmatan
€59,750
Tahun pembuatan
2010
Keadaan
Terpakai
Lokasi
Dresden 

Gambar menunjukkan
Tunjukkan peta
Data mesin
- Nama mesin:
- Modul Depan Wafer 300mm
- Pengeluar:
- BROOKS ASYST
- Model:
- Spartan EFEM Sorter
- Tahun pembuatan:
- 2010
- Keadaan:
- terpakai
Harga & Lokasi
harga tetap ditambah cukai perkhidmatan
€59,750
- Lokasi:
- Heilbronner Str. 22, 01189 Dresden, Deutschland

Hubungi
Butiran tawaran
- ID iklan:
- A20798077
- Nombor rujukan:
- LW43278
- Kemas kini:
- terakhir pada 19.12.2025
Penerangan
Brooks Automation Wafer Front-End Module, 300mm, ASYST Spartan EFEM, Sorter
Model: ASYST Spartan EFEM
Type: Sorter
Condition: Used
Ijdpfx Agjx I Ax Sepstr
Technical Data:
100-240V AC
50/60Hz
10A
General:
300-mm EFEM with 3 load ports, cleanroom mini-environment, and integrated wafer transfer robot
This unit is an Equipment Front End Module (EFEM) from the ASYST Spartan series, designed for fully automated handling of 300 mm silicon wafers in semiconductor manufacturing.
It features three load ports, a mini-environment with ULPA air filters, internal lighting, comprehensive safety controls, and all necessary interfaces for seamless integration into production lines.
In addition, it comes with a fully integrated wafer transfer robot that extracts wafers from FOUP/carrier load ports, separates them, and precisely delivers them to downstream process modules.
Year of manufacture: 27.12.2010
Including CD with operating, service, and installation manuals (9701-3060-01 Rev G)
Iklan ini diterjemahkan secara automatik. Mungkin terdapat kesilapan terjemahan.
Model: ASYST Spartan EFEM
Type: Sorter
Condition: Used
Ijdpfx Agjx I Ax Sepstr
Technical Data:
100-240V AC
50/60Hz
10A
General:
300-mm EFEM with 3 load ports, cleanroom mini-environment, and integrated wafer transfer robot
This unit is an Equipment Front End Module (EFEM) from the ASYST Spartan series, designed for fully automated handling of 300 mm silicon wafers in semiconductor manufacturing.
It features three load ports, a mini-environment with ULPA air filters, internal lighting, comprehensive safety controls, and all necessary interfaces for seamless integration into production lines.
In addition, it comes with a fully integrated wafer transfer robot that extracts wafers from FOUP/carrier load ports, separates them, and precisely delivers them to downstream process modules.
Year of manufacture: 27.12.2010
Including CD with operating, service, and installation manuals (9701-3060-01 Rev G)
Iklan ini diterjemahkan secara automatik. Mungkin terdapat kesilapan terjemahan.
Pembekal
Nota: Daftar secara percuma atau log masuk, untuk mengakses semua maklumat.
Didaftarkan sejak: 2014
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